Organic Source
Product introduction
| Model | BE-550S |
|---|---|
| Description | This product is the 5.5G OLED linear source to control thin film uniformity and target thickness. |
Specification
| Type | Horizontal Evaporation |
|---|---|
| Target Substrate | 2G~5.5G |
| Uniformity | < 3% |
| Deposition Rate | 0.1~20Å/s |
| TS | Customized from 250mm |
| Capacity | 3000cc |
Feature
| Feature & Advantages | Large scale deposition (Gen 2~5.5) |
|---|---|
| Uniformity thin thckness (<3%) | |
| Design related TS | |
| Customized linear source can be manufactured |