Organic Source
Product introduction
Model | BE-550S |
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Description | This product is the 5.5G OLED linear source to control thin film uniformity and target thickness. |
Specification
Type | Horizontal Evaporation |
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Target Substrate | 2G~5.5G |
Uniformity | < 3% |
Deposition Rate | 0.1~20Å/s |
TS | Customized from 250mm |
Capacity | 3000cc |

Feature
Feature & Advantages | Large scale deposition (Gen 2~5.5) |
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Uniformity thin thckness (<3%) | |
Design related TS | |
Customized linear source can be manufactured |