Inorganic Source
Introduction
| Model | BE-50~500PS |
|---|---|
| Description | This product is a OLED metal source which is used to evaporate Inorganic materials(Ag, Mg, Al, LiF, ...). |
Specification
| Heater type | Single & Double |
|---|---|
| Heater filament | Ta (Wire, Sheet) |
| Capacity | ~ 500cc |
| Crucible | PBN, Graphite |
| Thermocouple | C-Type |
| Operationg Temp. | ~1200°C |
Feature
| Feature & Advantages | Evaporation with inorganic material(Ag, Mg, LiF, Al ) |
|---|---|
| Uniformity thin film thickness(< 3%) | |
| Customizing the customer’s process condition |