R&D Evaporator
Product introduction
| Model | BE-100ODC |
|---|---|
| Description | This product is for R&D of OLED device. It`s able to deposite organic-inorganic each other. |
Specification
| Chamber size | Dia 450 x 500H |
|---|---|
| Vacuum level | 5x10-06 torr |
| Substrate width | 100mm |
| TS | 300mm |
| Remarks | Substrate Rotation |
Feature
| Feature & Advantages | Substarte rotaiton |
|---|---|
| Include source and shutter | |
| Include substrate holder | |
| PC/PLC control system | |
| PID control of temperature and rate |