R&D Evaporator 2018-03-02T16:04:03+00:00

R&D Evaporator

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Product introduction

Model BE-100ODC
Description This product is for R&D of OLED device. It`s able to deposite organic-inorganic each other.


Chamber size Dia 450 x 500H
Vacuum level 5x10-06 torr
Substrate width 100mm
TS 300mm
Remarks Substrate Rotation


Feature & Advantages Substarte rotaiton
Include source and shutter
Include substrate holder
PC/PLC control system
PID control of temperature and rate