CIGS Evaporation Equipment
Introduction
| Model | SC-100PC |
|---|---|
| Description | This product is the R&D manufacturing system for the photovoltaic(CIGS) cell which can be used to co-evaporate Cu, In, Ga, Se. |
Specification
| Substrate Size | 100×100mm / 200×200mm |
|---|---|
| Evaporation Material | Cu, In, Ga, Se(Co-evaporation) |
| Substrate Heating | Max 600℃ |
| Uniformity | < 3% |
Feature
| Feature & Advantage | High vacuum level (under 10-7 torr) |
|---|---|
| Cu, In, Ga, Se (Co-evaporation) | |
| Research and development for CIGS |